Analysis of the Characteristics of silicon micro-pressure sensors and industrial applications
Release Date：2013-12-10 00:00
products manufactured using micro-machining technology is a silicon
micro- pressure sensors , which U.S. Japan and Europe have formed
industry . Silicon has developed rapidly in recent years, miniature pressure
sensor , the sensor is mainly used in the automotive industry and health
miniature silicon pressure sensor is small, light weight , no moving
parts , high reliability , but also large-scale production of the sensor
, so low cost. High
reliability, low cost requirements for the automotive industry can be
said to be very suitable, it was quickly expanded its applications in
the automotive industry . Such
as automatic braking system pressure car surface pressure , tire
pressure , balloon pressure , transmission fluid pressure , fluid
pressure injection system , fuel injection pressure, engine oil pressure
. Intake manifold pressure sensor has a silicon micro- pressure amount useless.
LUCASNOVASENSOR companies even using micro-machining techniques to develop a direct buried tire pressure sensors. It is very low in car tires or tire pressure when the gas ran to alert the driver . The annual auto production capacity of up to several thousand units worldwide , so this is a very promising market .
Silicon micro- pressure sensors in healthcare applications where the maximum blood pressure monitor. Allegedly some large medical equipment manufacturer to be used every year nearly 5 million pressure sensors. In
addition, women in childbirth the uterus while monitoring the pressure
with a miniature silicon pressure sensors , intravenous liquid flow
sensor monitors are a considerable number of market demand. Many other healthcare applications are being constantly developed.
Silicon miniature pressure sensor is basically divided into two categories: capacitive and piezoresistive . Capacitive
pressure sensor comprising a membrane , which acts as one plate of the
variable air capacitor , the film when subjected to pressure , the film
displacement , thereby changing the capacitance value , with this change
process through the respective circuits , the pressure can be obtained value. The
principle of resistance change is generated when a silicon
piezoresistive material to withstand the pressure sensor is made ,
generally four strain resistance silicon material constituting the
Wheatstone bridge to measure pressure.